Synthesis of TiO2 thin films on different substrates by chemical vapor deposition method

Ta Hong Duc; Phan Ngoc Quang; Vu Viet Thang; Le Minh Thang

doi:10.51316/jca.2021.073

Authors

Ta Hong Duc School of Chemical Engineering, Hanoi University of Science and Technology, Vietnam Author
Phan Ngoc Quang School of Chemical Engineering, Hanoi University of Science and Technology, Vietnam Author
Vu Viet Thang School of Chemical Engineering, Hanoi University of Science and Technology, Vietnam Author
Le Minh Thang School of Chemical Engineering, Hanoi University of Science and Technology, Vietnam Author

DOI:

https://doi.org/10.51316/jca.2021.073

Keywords:

TiO2 thin films, Chemical Vapor Deposition, Methyl orange, Photocatalysis

Abstract

TiO₂ thin films were synthesized by using Chemical Vapor Deposition (CVD) method on different substrates, such as glass, aluminium foil , and ceramic. The samples had been characterized by microscopy analysis, SEM, and EDS. The results show that TiO₂ thin films were successfully fabricated and TiO₂ nanocrystals with size of 50-100 nm loaded uniformly on surface of different substrates. The photocatalytic activities of all samples were investigated in photo-degradation of methyl orange (MO) under UV light irradiation and was followed by the UV-Vis diffuse reflectance spectroscopy, showing that the conversion of methyl orange achieved the highest percentage of 91% with TiO₂ thin film synthesized on the ceramic substrate over 270 minutes of reaction. The hypothetical mechanism explaining this observation is that the surface morphology of ceramic plays a major role in the augmentation of MO molecules adsorption onto the surface of material, thus, improves the dye degradation process.

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